Frontier Micro-Electro-Mechanical Systems (MEMS) Materials and Devices

4 credits

Fabrication of Micro-Electro-Mechanical Systems (MEMS) by bulk and surface micromachining of single crystal, polycrystal, and amorphous silicon and other materials. Performance issues including electrostatic, magnetic, piezoelectric actuations, residual stresses, deformation. Novel device applications, future trends in smart materials and nano-electro-mechanical (NEMS) systems. Prerequisites: consent of instructor. (Cross-listed with MAE 268.)