Synthesis and Fabrication of NanoEngineering Systems

4 credits

Introduction to methods for fabricating materials and devices in NanoEngineering. Nano-particle, -vesicle, -tube, and -wire synthesis. Top-down methods including chemical vapor deposition, conventional and advanced lithography, doping, and etching. Bottom-up methods including self-assembly. Integration of heterogeneous structures into functioning devices. Prerequisites : NANO 102 and NANO 104.