Mechanics of MEMS credit:

4 Hours

Mechanics and dynamics of microelectromechanical systems (MEMS); scaling laws in electrostatics, magnetics, and fluidics; analytical models for thin-film growth and etching; effect of surface tension in small dimensions in relations to stability of MEMS during web fabrication; size effects on mechanical properties of MEMS materials; equations of motion for MEMS, involving coupled elastic and electric fields that give rise to nonlinear dynamical behavior; Mathieu behavior and chaotic systems. Prerequisite: ME 485 .