Micro/Nano Manufacturing

3 ch (3C) · Undergraduate

Review of principles and practices of micro/nano fabrication technologies with research and industrial perspectives. Introduction to micro/nano fabrication and its applications in MEMS/NEMS, renewable energy and biomaterials; materials selection; silicon processing; lithography process; thin film fabrication; advanced lithography process; characterization and micro/nano measurement techniques; atomic force microscopy and its applications.