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EE 471

Introduction to Micro and Nanotechnology

3 credits · Undergraduate

A multidisciplinary introduction to the processing of micro and nano scale structures that are applied in emerging fields of high resolution patterning such as micro/nano electronics, photonics and fluidics. Fundamental technology issues including materials, instrumentation, fabrication, and inspection are discussed. Lectures are complemented by a mandatory laboratory component performed in a research laboratory. Laboratory access requires successful completion of safety training offered at the beginning of the course.

Prerequisites & course information

Weekly hours: 3 Lecture hours and 2 Practicum/Lab hours Prerequisite(s): EE 271 or EP 317 or ME 214.

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