Chemical Engineering for Micro- and Nanofabrication

3 Hours

Definition and description of the terminology and processes of microelectronics, including semiconductor facilities and chemical processes for integrated circuit manufacture, with an emphasis on unit processes; the major unit process, including thin-film metals and dielectrics deposition and etching, silicon oxidation and etching, ion implantation, diffusion, lithography, planarization, and process control; and an overview of promising nanopatterning and nanofabrication techniques, such as particle-beam imaging, nanoimprint, and near-field probe imaging, implantation, diffusion, lithography, planarization, and process control. Three lecture hours a week for one semester.