Nanometrology and Big Data

Prerequisites & course information

Explore key concepts of metrology and data analytics in nanomanufacturing systems. Discuss the key steps in big data analytics which enable transformation of metrology and sensing data into optimal decisions. Examine key enabling methodologies and examples for statistical and dynamic modeling of big data in nanomanufacturing systems, as well as how those models are used for system-wide optimal decisions in terms of process control and system operations. Three lecture hours a week for one semester.