Plasma Processing of Semiconductors II
Explore plasma chemistry and equilibrium; analysis of molecular collisions; chemical kinetics and surface processes; plasma discharge particle and energy balance; analysis of inductive and DC plasma processing reactors; plasma etching, deposition, and implantation. Electrical and Computer Engineering 396K (Topic 20) and Electrical Engineering 396K (Topic 20) may not both be counted.
Prerequisites & course information
Explore plasma chemistry and equilibrium; analysis of molecular collisions; chemical kinetics and surface processes; plasma discharge particle and energy balance; analysis of inductive and DC plasma processing reactors; plasma etching, deposition, and implantation. Electrical and Computer Engineering 396K (Topic 20) and Electrical Engineering 396K (Topic 20) may not both be counted.
Sources
- Course catalogue ↗2026-2027