M E 386S.1
Thin Films and Interfaces
Application of thin films and interfaces in microelectronics; basic properties, deposition techniques, microstructures and defects, diffusion characteristics; materials reaction in thin films and at interfaces.
Prerequisites & course information
Application of thin films and interfaces in microelectronics; basic properties, deposition techniques, microstructures and defects, diffusion characteristics; materials reaction in thin films and at interfaces.
Sources
- Course catalogue ↗2026-2027