Analytics and Control in Semiconductor Manufacturing

3 Hours

Learn key data analytics and process control methods for turning metrology and sensing data into useful information and decisions in semiconductor manufacturing. Explore applications of statistical models for statistical process control, as well as applications of dynamic models for virtual metrology and run-to-run control in semiconductor manufacturing systems. Only one of the following may be counted: Mechanical Engineering 397 (Topic: Analytics/Control Semi Manuf), 392Q (Topic 13), Operations Research and Industrial Engineering 397 (Topic: Analytics/Control Semi Manuf), 390Q (Topic 9).