Modeling of MEMS

4 credits

Microelectro mechanical systems (MEMS) including lumped modeling, conjugate power variables, electrostatic and magnetic actuators, linear transducers, linear system dynamics, design optimization, and thermal analysis. Numerical modeling topics include electro (quasi) static, mechanical, electro mechanical, magneto (quasi) static, and fluidic phenomena; parametric analysis, visualization of multi-dimensional solutions; and verification of results. Offered: jointly with MSE 505.