Introduction to Microelectro Mechanical Systems

4 credits

Theoretical and practical aspects in design, analysis, and fabrication of MEMS devices. Fabrication processes, including bulk and surface micromachining. MEMS design and layout. MEMS CAD tools. Mechanical and electrical design. Applications such as micro sensors and actuators, or chemical and thermal transducers, recent advances. Course overlaps with: EE P 504. Offered: jointly with M E 504/MSE 504.