Microfabrication

4 credits

Principles and techniques for the fabrication of microelectronics devices and integrated circuits. Includes clean room laboratory practices and chemical safety, photolithography, wet and dry etching, oxidation and diffusion, metallization and dielectric deposition, compressed gas systems, vacuum systems, thermal processing systems, plasma systems, and metrology. Extensive laboratory with limited enrollment. Course overlaps with: EE P 527. Recommended: Cannot be taken for credit if credit received for EE P 527.