Principles and Methods of Micro and Nanofabrication

3 units

A hands-on introduction to the fundamentals of micro- and nano-fabrication processes with emphasis on cleanroom practices. The physical principles of oxidation, optical lithography, thin film deposition, etching and metrology methods will be discussed, demonstrated and practiced. Students will be trained in cleanroom concepts and safety protocols. Sequential micro-fabrication processes involved in the manufacture of microelectronic and photonic devices will be shown. Training in imaging and characterization of micro- and nano-structures will be provided.