Micro-Electro-Mechanical Systems II

3 units

A second course in MEMS. Topics include: physical microsystems, pressure sensors, accelerometers, microfluids and micro-scale thermal phenomena, electroosmotic flows, microvalves, micropumps, optical MEMS, active flow control, system and constraints on microsystem design, compliant mechanisms, microfabricated electrochemical sensors, bio-MEMS and case studies.