ECE 631

Microelectronic Processing Technology

Graduate

Winter 2018 · E&CE 631 Info sheet C.R.Selvakumar

Readings

Silicon VLSI Technolog: Fundamentals, practice and modeling
unspecified
W.R. Runyan and K.E. Bean, Semiconductor Integrated Circuit Processing Technology, Addison-Wesley 1990
unspecified
S.K. Ghandhi, VLSI Fabrication Principles, John Wiley 1994
unspecified
S.M. Sze, VLSI Technology, McGraw -Hill 1988
unspecified
5. Journal articles and review articles Lecture Hours and Hall : Please check Quest for details. [http://www.adm.uwaterloo.ca/infocour/CIR/SA/grad.html ]
unspecified

Sources

Course catalogue ↗2026–2027
Course source ↗2021
course_outline ↗Winter 2018
Official public PDF outline or course description. Materials and topic extracts may be partial; consult the linked source for the full list.