ECE 635
Fabrication in the Nanoscale: Principles, Technology, & Applications
Fall 2024
Topics
- Resolution enhancement techniques for photolithography
- Other types of photon-based lithography
- Extreme UV lithography
- X-ray lithography
- Electron beam lithography
- Focused ion beam lithography
- Nanoimprint lithography
- Scanning probe microscopy and lithography
- Soft lithography and other patterning techniques
- Lithography based on self-assembly
Readings
- Zheng Cui, Nanofabrication: Principles, Capabilities and Limits, Springer, 2017 (2nd edition, PDF version of this book is available at the Library).
- Ampere A Tseng (Editor), Nanofabrication: Fundamentals and Applications, World Scientific, 2008 (optional) Zheng Cui, Micro-nanofabrication: Technologies and Applications, Springer, 2013 (optional)
Fall 2021 · Nano Probing and Lithoography
Topics
- Resolution enhancement techniques for photolithography
- Other types of photon-based lithography
- Extreme UV lithography
- X-ray lithography
- Electron beam lithography
- Focused ion beam lithography
- Nanoimprint lithography
- Scanning probe microscopy and lithography
- Soft lithography and other patterning techniques
- Lithography based on self-assembly
Readings
- Zheng Cui, Nanofabrication: Principles, Capabilities and Limits, Springer, 2017.
- : Ampere A Tseng (Editor), Nanofabrication: Fundamentals and Applications, World Scientific, 2008. (edited book, written by many authors, so it is not as consistent as the sole-author
- Zheng Cui, Micro-nanofabrication: Technologies and Applications, Springer, 2006. (earlier version of the textbook by the same author)
- Course Web Site: A course homepage is available on LEARN. If you want to know well in advance what will be covered, check: http://ece.uwaterloo.ca/~bcui/NE_353.html (there are a lot more slides than we will cover, good for your reference if you go to graduate school and need to learn more in this topic)
Fall 2018 · Fabrication in the nanoscale: principles, technology and applications
Topics
- High resolution electron beam resist.
- Helium ion lithography.
- Plastic/polymer mold for nanoimprint lithography.
- Ion (or electron) beam induced deposition.
- Recent progress in LIGA process.
- X-ray imaging using zone plate lens.
- Guided block copolymer self-assembly.
- TEM sample preparation by FIB.
- Dip pen nanolithography.
- Applications of soft-lithography.
- Fabrication or manufacturing of ..... your choice of device.
Readings
- Nanofabrication: principles, capabilities and limits, written by Zheng Cui, Springer 2008.
- Nanofabrication: fundamentals and applications, edited by Ampere A. Tseng, World Scientific 2008. (reference book, not as well written as the book by Zheng Cui)
- Lecture slides. (will be posted to LEARN)
Sources
- Course catalogue ↗2026–2027
- course_outline ↗Fall 2024
- course_outline ↗Fall 2021
- course_outline ↗Fall 2018
- Official public PDF outline or course description. Materials and topic extracts may be partial; consult the linked source for the full list. Course title supplied from the current catalogue because the archival heading only gives the code.
- Official public PDF outline or course description. Materials and topic extracts may be partial; consult the linked source for the full list.
- Public departmental course outline. Source may be archival; no current-term assignment is implied. Bibliographic details are preserved in textbook notes.