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ECE 730

Special Topics in Solid State Devices

Graduate

Winter 2025

Readings

  • AND RESOURCES None required. Article handouts provided and lecture slides will supplement course lectures. Qiskit tutorials for quantum programming: https://learning.quantum.ibm.com/
    unspecified
Spring 2025 · T39 – Quantum Sensing

Topics

  • Quantum states, operators, entanglement and quantum dynamics
  • Quantum noise, squeezing, measurement backaction and sensing limits
  • Cavity optomechanics, resonators, cooling and mechanical sensing
  • Superconducting circuits, Josephson devices, quantum detectors and parametric amplifiers
Winter 2024 · Nanobiotechnology Systems and Microfluidics, [offered: W 2024]

Topics

  • DNA, RNA, proteins and molecular biology
  • ELISA and molecular diagnostic tools
  • Nanobiosensors and bioreceptors
  • Microfluidic principles and fabrication
  • COMSOL modelling
  • Sorting and mixing in microfluidic systems
  • Structurally programmed capillary-flow events
  • Biomedical diagnostics, organ-on-chip and paper-based microfluidics

Readings

  • Students select and present a research paper on microfluidics for biomedical engineering and conduct a literature review. No specific paper titles are listed.
    unspecified
Spring 2024 · Graduate Course Description: ECE 730_Topic 10 (Spring 2024) 1 / 2

Topics

  • Vacuum and Plasma Processes Introduction to vacuum, introduction to plasmas, collision processes in plasmas, electrical characteristics of plasmas, dc glow discharges, RF discharges.
  • Thin Films and Deposition Processes Physical and chemical vapor deposition; Atomic layer deposition; Plasma processes; Molecular beam and liquid phase epitaxy.
  • Plasma Etching Processes Role of etching in device fabrication; Modes of plasma etching; Etch chemistries; Reactive ion etching; Profile control in specific device structures.
  • Fabrication of Nanostructures Top-down and bottom-up approaches; Zero-, one-, and two- dimensional structures; Nanoparticles and quantum dots; Nanotubes.
  • Optical Lithography and its limits Exposure techniques; Sub-micron processing; Optical lithography and its limits.
  • Nano-patterning Electron beam lithography; Nano-imprint lithography; Scanning probe techniques; Atomic scale manipulation.
  • Graduate Course Description: ECE 730_Topic 10 (Spring 2024) 2 / 2
  • ‘Transistor fabrication and CMOS Processes for Junctions and Gate dielectrics; Basics of MOS transistor fabrication; CMOS Process sequence; Layout design; Material implications.
  • Fabrication of Thin film devices Processes for thin film transistors; Circuit implementation; Display backplanes; Solar cells and photodetectors.
  • Nanoelectronic device fabrication Trends in future fabrication options for nanoelectronic devices

Readings

  • Course Notes
    unspecified
Fall 2024

Topics

  • Semiconductor industry and MOSFET fundamentals
  • Device scaling and numerical modelling
  • Short-channel electrostatics and scale-length theory
  • SOI, FinFET, multi-gate and gate-all-around devices
  • Threshold voltage, quantum effects and channel doping
  • Carrier mobility, velocity saturation and ballistic transport
  • Strain engineering and alternative channel materials
  • High-field effects, tunnelling, breakdown and dielectric degradation
  • Parasitic resistance and capacitance
  • CMOS delay, power and device-pitch scaling

Readings

  • Fundamentals of Modern VLSI Devices
    Y. Taur and T. H. Ning · 2nd · unspecified
    Cambridge; approximately chapters 1–5 and 10 covered.
  • Course notes are provided on LEARN.
    unspecified
Fall 2024

Readings

  • None required. Article handouts provided and lecture slides will supplement course lectures. RESOURCES Qiskit tutorials for quantum machine learning: https://qiskit.org/learn/course/machine-learning- course/ Sci-Kit user guides for classical machine learning: https://scikit-learn.org/stable/user_guide.html GRADE DISTRIBUTION
    unspecified
Spring 2023 · Topics in Solid State Devices

Topics

  • Introduction to semiconductor devices and technology
  • CMOS fabrication process overview
  • Crystal growth, wafer fabrication
  • Lithography
  • Thermal oxidation
  • Dopant diffusion
  • Ion implantation
  • Thin film deposition
  • Etching.

Readings

  • Plummer, Deal & Griffin, Silicon VLSI Technology: Fundamentals, Practice, and Modeling, Prentice Hall, 2000. (ISBN-10: 0130850373)
    unspecified
  • Campbell, Fabrication Engineering at the Micro and Nanoscale, Oxford, 2008, ISBN:9780195320176 (this is third edition). Second edition: The Science and Engineering of Microelectronic Fabrication, 2001
    unspecified
  • Course Web Site: A course homepage is available on UW LEARN.
    unspecified
Fall 2023

Readings

  • None required. Article handouts provided and lecture slides will supplement course lectures. None required. Article handouts provided and lecture notes will supplement course lectures. RESOURCES Qiskit tutorials for quantum machine learning: https://qiskit.org/learn/course/machine-learning- course/ Sci-Kit user guides for classical machine learning: https://scikit-learn.org/stable/user_guide.html GRADE DISTRIBUTION
    unspecified
Spring 2022 · Microfabrication and Thin-film Technology

Topics

  • Introduction to semiconductor devices and technology
  • CMOS fabrication process overview
  • Crystal growth, wafer fabrication
  • Lithography
  • Thermal oxidation
  • Dopant diffusion
  • Ion implantation
  • Thin film deposition
  • Etching.

Readings

  • Plummer, Deal & Griffin, Silicon VLSI Technology: Fundamentals, Practice, and Modeling, Prentice Hall, 2000. (ISBN-10: 0130850373)
    unspecified
  • Campbell, Fabrication Engineering at the Micro and Nanoscale, Oxford, 2008 ISBN:9780195320176 (this is third edition) Second edition: The Science and Engineering of Microelectronic Fabrication, 2001
    unspecified
  • Course Web Site: A course homepage will be available on UW LEARN.
    unspecified
Fall 2022 · Introduction to Noise Processes: Classical and Quantum Devices

Readings

  • None required. Article handouts provided and lecture slides will supplement course lectures.
    unspecified
Spring 2021 · Advanced Technology for semiconductor processing

Topics

  • Introduction to semiconductor devices and technology
  • CMOS fabrication process overview
  • Crystal growth, wafer fabrication
  • Lithography
  • Thermal oxidation
  • Dopant diffusion
  • Ion implantation
  • Thin film deposition
  • Etching.

Readings

  • Plummer, Deal & Griffin, Silicon VLSI Technology: Fundamentals, Practice, and Modeling, Prentice Hall, 2000. (ISBN-10: 0130850373)
    unspecified
  • Campbell, Fabrication Engineering at the Micro and Nanoscale, Oxford, 2008, ISBN:9780195320176 (this is third edition). Second edition: The Science and Engineering of Microelectronic Fabrication, 2001
    unspecified
  • Course Web Site: A course homepage is available on UW LEARN.
    unspecified
Spring 2021 · Topics in Solid State Devices: Advanced VLSI Devices

Topics

  • Semiconductor industry and MOSFET fundamentals
  • Device scaling and numerical modelling
  • Short-channel electrostatics and scale-length theory
  • SOI, FinFET, multi-gate and gate-all-around devices
  • Threshold voltage, quantum effects and channel doping
  • Carrier mobility, velocity saturation and ballistic transport
  • Strain engineering and alternative channel materials
  • High-field effects, tunnelling, breakdown and dielectric degradation
  • Parasitic resistance and capacitance
  • CMOS delay, power and device-pitch scaling

Readings

  • Fundamentals of Modern VLSI Devices
    Y. Taur and T. H. Ning · 2nd · unspecified
    Cambridge; approximately chapters 1–5 and 10 covered.
  • Course notes are provided on LEARN.
    unspecified
Fall 2020 · Introduction to Noise Processes: Classical and Quantum Devices

Readings

  • None required. Article handouts provided and lecture slides will supplement course lectures.
    unspecified
Fall 2020 · Topics in Solid State Devices: Biosensing - Fundamentals and Applications

Readings

  • Molecular Biology of the Cell
    Bruce Alberts et al. · recommended
    Garland Science, 2002; extra reading.
  • Introductory Bioelectronics: for Engineers and Physical Scientists
    R. Pethig and S. Smith · recommended
    Wiley, 2012; ISBN 9781119970873; extra reading.
  • Chemical Sensors and Biosensors: Fundamentals and Applications
    F. G. Banica · recommended
    2012; ISBN 9780470710661; extra reading.
  • Fundamentals of Microfabrication
    Marc Madou · recommended
    Extra reading.
  • No formal text. Research and review articles are distributed by email.
    unspecified
Winter 2018 · Topic 29 - Winter 2018

Readings

  • Quantum Transport: Atom to Transistor, Supriyo Datta, Cambridge University Press (2013).
    unspecified
  • Lessons from Nanoelectronics: A New Perspective on Transport, Supriyo Datta, World Scientific (2012).
    unspecified
  • No textbook is required for this course.
    unspecified
Winter 2017 · Topic 10 - Winter 2017

Readings

  • Course Notes
    unspecified
Spring 2017 · Topic 33 - Spring 2017

Topics

  • PART 1
  • PART 2
  • PART 4: Measurements and Decoherence (2 weeks) Measurement limits Coherence and decoherence processes Control Theory and Feedback Control Open and Closed Systems

Readings

  • None required. Article handouts provided and lecture notes will supplement course lectures.
    unspecified
Fall 2017 · Topic 31 - Fall 2017

Topics

  • Overview of physical implementations for generating non-classical states of light Atoms NV centers Quantum dots
  • Properties of an ideal quantum light source
  • Controlling light at the nanoscale On-demand single photon sources Light collection efficiency strategies for quantum emitters (photonic nanowires, microcavities, waveguides)
  • Characterizing quantum light sources Photon statistics Photon coherence Photon indistinguishability
  • On-demand entangled photon generation
  • Manipulating electronic properties of quantum dots Tunable quantum light sources
  • Integrated quantum photonic circuits
  • Quantum detectors
  • Applications in quantum optics and quantum information Multi-photon entanglement Secure quantum communication Quantum repeater Quantum teleportation Interfacing quantum processors via single photons Quantum Imaging
Fall 2017 · Topic 32 - Fall 2017

Topics

  • Topics and schedule (will vary slightly depending on class size and departments of origin, presently assuming 15 people)
  • Biological assembly technologies Brief introduction to DNA and protein based assembly methods
  • Biological design methods Design methods for molecular machine development, primarily upon directed evolution-based design methods with some discussion of simulation methods.
  • Molecular machinery in living systems Molecular machines, their design, principles of operation and applications in living organisms.
  • Molecular machinery in applications Molecular machines in computation, energy production, green manufacture and similar applications within human-designed systems.
  • Proton pumps Theory, principles of operation and applications of proton pumps.
  • Spin Spin in biological systems: Theory, principles of operation and applications.
  • Summary of challenges and frontiers in quantum biology Summary of quantum effects in biological systems, their applications and challenges.
  • On-line e-journal references will be provided throughout the course – all of which are available through the University of Waterloo Library.

Readings

  • No textbook is required. Lecture notes and handouts are provided.
    unspecified
Spring 2016 · Topic 22 - Spring 2016

Readings

  • CMOS/CCD Sensors and Camera Systems, 2nd edition, Gerald C. Holst, Terrence S. Lomheim, JCD Publishing/SPIE, 2011.
    2nd edition · unspecified
  • Handbook of Medical Imaging, Volume 1: Physics and Psychophysics (SPIE PRESS Monograph Vol. PM79), Jacob Beutel, Harold L. Kundel, Richard L. Van Metter, Society of Photo-optical Instrumentation Engineers, February 2000.
    unspecified
  • Lecture Notes
    unspecified
Fall 2016 · Topic 24 - Fall 2016

Readings

  • Nanofabrication: principles, capabilities and limits, written by Zheng Cui, Springer 2008. (required)
    unspecified
  • Nanofabrication: fundamentals and applications, edited by Ampere A. Tseng, World Scientific 2008. (reference book)
    unspecified
  • Lecture slides and notes.
    unspecified
Spring 2015 · Topic 26 - Spring 2015

Topics

  • Introduction to crystal growth and epitaxy (2 hours) Crystallography ABCs; Crystal growth thermodynamics ABCs; Bulk crustal growth technologies; Epitaxial Technologies
  • Focus on Molecular Beam Epitaxy (MBE)
  • MBE technology overview
  • The Physics of MBE
  • From Quantum Wells to Quantum Wires, Dots and Molecules – MBE for nanotechnology
  • In-situ techniques for MBE growth monitoring and layer characterization
  • High Resolution X-Ray Diffraction for Epitaxial Structures (5 hours) Overview; Reciprocal Space; Analysis of Epitaxial Layers; Simulation of X-ray Diffraction Rocking Curves; Triple-Axis Diffractometry; Separation of lattice tilts and strains; Full reciprocal space mapping and applications; Interface Roughness Metrology
  • Chemical and Physical Characterization of Epitaxial Structures (4 hours) Transmission Electron Microscopy (TEM); Atom Probe Tomography (APT); Scanning Electron Microscopy (SEM); Cathodoluminescence (CL); Electron Beam Induced Current (EBIC); Auger Electron Spectroscopy (AES); Secondary Ion Mass Spectrometry (SIMS); Rutherford Backscattering Spectrometry (RBS)
  • Optical Characterization of Epitaxial Structures (4 hours) Dark-Field, Phase, and Interference Contrast Microscopy; Interferometric Microscopy; Defect Etches; Ellipsometry; Transmission; Reflection; Transmission Matrix Method for multilayer structures, Contactless Electro Reflectance; Light Scattering; Photoluminescence (PL); Raman Spectroscopy
  • Characterization of Epitaxial Structures – probing minority and majority carriers

Readings

  • Molecular Beam Epitaxy. From Research to Mass Production
    unspecified
  • Molecular Beam Epitaxy. Applications to Key Materials
    unspecified
  • Handbook of Self Assembled Semiconductor Nanostructures for Novel Devices in Photonics and Electronics
    unspecified
  • Self-Assembly of Nanostructures
    unspecified
  • Semiconductor Material and Device Characterization
    unspecified
  • Transmission Electron Microscopy, a Textbook for Material Science
    unspecified
  • X-Ray Metrology in Semiconductor Manufacturing
    unspecified
  • No textbook required. Lecture notes and handouts will be provided.
    unspecified
Winter 2014 · Topic 19 - Winter 2014

Topics

  • Conventional magnetism Diamagnetism Paramagnetism Ferromagnetism Ferrimagnetism Antiferromagnetism
  • Magnetization process Single domain switching Superparamagnetic particles Domain walls Exchange bias
  • Spin-dependent electronic transport Transport of free electron gas: spin-orbit interaction Giant magnetoresitance Spin tunneling
  • Spintronic devices Magnetic recording: hard drive, MRAM Spin FET All spin-logic processor Quantum computing processor

Readings

  • Modern Magnetic Materials: Principles and Applications; Introduction to Spintronics
    required
Winter 2014 · topic 18 - Winter 2014

Topics

  • Introduction to OLEDs: OLED Operation Mechanism, injection, transport and emission of light. Organic heteojunction. General comparison of inorganic versus organic devices
  • Electronic Structure of Organic Molecules Electronic structure of atoms, Atomic and Molecular Orbitals, LCAO, Bonding and antibondig orbitals, Orbital hybridization, HOMO and LUMO levels, Conjugated Molecules
  • Photophysics of Organic Molecules Excited states: (Absorption and emission, Singlet and triplet states), Rates of electronic transitions, Transition moment, Frank Condon Principle, Radiative and non-radiative transitions, Excited state kinetics
  • Exciton Processes in Organic Solids The Solid State: (Bonding, states of matter, amorphous & crystalline states), Excitons, Forester and Dexter energy transfer, Exciton quenching processes
  • Electronic Conduction in Organic Solids Conductivity: (carrier concentration versus mobility), Carrier generation, Hopping transport, Mobility measurements, Traps.
  • Aspects of OLED Physics and Technology Charge injection from metal contacts, Charge transport and device characteristics, Exciton formation and luminescence, Stability and aging, Contrast, RGP patterning approaches.
  • Organic Light Harvesting Devices Photoreceptor Devices, Photodetector Devices, Photovoltaic Devices: General background, device operation mechanism and characteristics, important phenomena, current challenges, recent developments
  • Organic Electronic Materials and Organic TFTs Small molecule and polymer materials for OEs. Hole and electron transport. Molecular design rules for mobility and chemical stability. OTFT operation mechanism and characteristics, important phenomena, challenges, recent developments
  • Selected Topics in Organic Electronics Quantum-dot OLEDs, Conducting polymers, etc.

Readings

  • Electronic Processes of Organic Crystals and Polymers
    2nd edition · unspecified
  • Essentials of Molecular Photochemistry
    unspecified
  • Organic Semiconductors
    unspecified
  • Physics of Organic Semiconductors
    unspecified
  • Organic Electronics: Materials, Manufacturing, and Applications
    1st edition · unspecified
  • Electrical transport in solids : with particular reference to organic semiconductors
    1st edition · unspecified
  • No textbook required. Lecture notes and handouts will be provided.
    unspecified
Sources