SYDE 682
Advanced MicroElectroMechanical Systems: Physics, Design & Fabrication
Fall 2021 · Advanced Microelectromechanical Systems
Topics
- Micromachining Techniques – Surface Micromachining, Bulk Micromachining, LIGA
- Micromachining Tools – RIE, DRIE, Evaporation, Sputtering, Photolithography, SEM, IC
- Review of Electrical & Mechanical Concepts – Semiconductors, Si Crystal Planes, Stress, Strain, Resonant Frequency & Q Factor
- MEMS Devices – Optical, Polymer, Thermal, Microfluidics
- Actuating Principles – Electrostatic, Electromagnetic, Thermal, Piezoelectric
- Sensing Principles – Capacitive, Resistive, Biosensing, Electromagnetic, Piezoresistive
- Micro domain Physics – Van der Vaal, Adhesive, Electrostatic
- Applications of MEMS
- Future Markets
- Nanotechnology
Readings
- Marc Madou Fundamentals of Microfabrication: The Science of Miniaturization CRC Press
- G.T.A. Kovac Micromachined Transducers Sourcebook McGraw-Hill Journals
Sources
- Course catalogue ↗2026–2027
- course_outline ↗Fall 2021
- Official public PDF outline or course description. Materials and topic extracts may be partial; consult the linked source for the full list.