SYDE 683
Design of MEMS and NEMS
Spring 2021 · / NANO 702
Readings
- Understanding MEMS: Principles and Applications ,
- Microsystem Design,
Fall 2021 · / NANO 702
Readings
- Understanding MEMS: Principles and Applications,
- Microsystem Design,
Sources
- Course catalogue ↗2026–2027
- course_outline ↗Spring 2021
- course_outline ↗Fall 2021
- Official public PDF outline or course description. Materials and topic extracts may be partial; consult the linked source for the full list.
- Official public PDF outline or course description. Materials and topic extracts may be partial; consult the linked source for the full list.