Microelectromechanical Systems

Undergraduate

MicroElectroMechanical System (MEMS) technology overview and design process; microfabrication and process integration; lumped element modeling; 3-D finite element modeling; energy conserving transducers (electrostatics); linear and nonlinear system dynamics; elasticity, stress, strain, material properties; structure analysis, beams, plates; MEMS sensing and actuation; material case studies; MEMS design methodology; device modeling. (Prerequisites: completion of all Electrical Engineering courses from 1st year, 2nd year and 3rd year.) (3 lecture, 2 laboratory/tutorial hours or equivalent a week.) (May be offered as a cross-career course with ELEC-8900. (Section 43)