Advanced Topics in Microelectromechanical Systems (MEMS)

Graduate

Review of advanced topics related to the theory and modeling of MEMS design and fabrication techniques. Topics to be covered include: advanced micromachining techniques, smart microelectromechanical sensing and actuation techniques, microfluidics, photonic MEMS, advanced materials, device modeling, MEMS design case studies, system integration, micro packaging, MEMS design methodology, and reliability issues related to MEMS devices. Emphasis is on theory, lumped element modeling, 3-D multi-domain finite element analysis, static and dynamic device behavior study using industry standard MEMS modeling tools, simulation of fabrication processes using actual fabrication process parameters, and design verification. (3 lecture hours a week.)