INTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS

Prerequisites & course information

Requisites: ( E C E 335 or 340 ), graduate/professional standing, or member of Engineering Guest Students Course Designation: Grad 50% - Counts toward 50% graduate coursework requirement Repeatable for Credit: No Last Taught: Fall 2026 Learning Outcomes: 1. Master fundamental fabrication techniques in integrated circuits and microelecromechanical systems (MEMS) Audience: Both Grad & Undergrad 2. Analyze and construct fabrication process flows for MEMS Audience: Both Grad & Undergrad 3. Analyze and design mechanical structures for MEMS Audience: Both Grad & Undergrad 4. Analyze and design mechanical sensors and actuators Audience: Both Grad & Undergrad 5. Analyze thermal and magnetic transducers, microfluidics, lab on chips, optical MEMS devices and radio frequency MEMS devices Audience: Both Grad & Undergrad 6. Design systems integrating MEMS devices with integrated circuits Audience: Graduate Learning Outcomes: 1. Master fundamental fabrication techniques in integrated circuits and microelecromechanical systems (MEMS) Audience: Both Grad & Undergrad 2. Analyze and construct fabrication process flows for MEMS Audience: Both Grad & Undergrad 3. Analyze and design mechanical structures for MEMS Audience: Both Grad & Undergrad 4. Analyze and design mechanical sensors and actuators Audience: Both Grad & Undergrad 5. Analyze thermal and magnetic transducers, microfluidics, lab on chips, optical MEMS devices and radio frequency MEMS devices Audience: Both Grad & Undergrad 6. Design systems integrating MEMS devices with integrated circuits Audience: Graduate