everything.study
M E 777

VACUUM TECHNOLOGY

3 credits.

Topics defining modern vacuum technology, including the kinetic theory of gases, conductance, pumping systems, pump technologies, pressure measurement, gas-surface interactions, sealing technologies, leak detection, and residual gas analysis will be addressed through a combination of lectures, laboratory activities, problem solving, and group discussions. Knowledge of fluid mechanics [such as M E 363 or B M E 320] strongly encouraged.

Prerequisites & course information

Requisites: Graduate/professional standing Course Designation: Grad 50% - Counts toward 50% graduate coursework requirement Repeatable for Credit: No Last Taught: Spring 2022 Learning Outcomes: 1. Use kinetic theory to determine key characteristics of a rarified gas such as the mean free path length, molecular flux and the average velocity Audience: Graduate 2. Calculate the conductance of a vacuum system for molecular, viscous, and transitional flow regimes Audience: Graduate 3. Calculate the time dependent pump down behavior of a vacuum system Audience: Graduate 4. Repair a rotary vane vacuum pump Audience: Graduate 5. Characterize the operation, advantages and disadvantages of low, medium, and high vacuum pumps Audience: Graduate 6. Characterize the operation, advantages and disadvantages of low and high vacuum gauges Audience: Graduate 7. Define and utilize appropriate leak detection methods for small, medium, and large leak rates Audience: Graduate Learning Outcomes: 1. Use kinetic theory to determine key characteristics of a rarified gas such as the mean free path length, molecular flux and the average velocity Audience: Graduate 2. Calculate the conductance of a vacuum system for molecular, viscous, and transitional flow regimes Audience: Graduate 3. Calculate the time dependent pump down behavior of a vacuum system Audience: Graduate 4. Repair a rotary vane vacuum pump Audience: Graduate 5. Characterize the operation, advantages and disadvantages of low, medium, and high vacuum pumps Audience: Graduate 6. Characterize the operation, advantages and disadvantages of low and high vacuum gauges Audience: Graduate 7. Define and utilize appropriate leak detection methods for small, medium, and large leak rates Audience: Graduate

Sources
Catalogue variants