INTRODUCTION TO THIN-FILM DEPOSITION PROCESSES
Introduction to major thin-film deposition techniques and properties of thin films. Evaporation, plasma assisted processes with emphasis on sputter deposition, chemical vapor deposition ion beams. Film properties and characterization methods, applications.
Prerequisites & course information
Requisites: ( M S & E 330 and 351 ), graduate/professional standing, or member of Engineering Guest Students Repeatable for Credit: No Last Taught: Spring 2026 Learning Outcomes: 1. Apply concepts of the kinetic theory of gases to vacuum science and technology Audience: Undergraduate 2. Explain the principles of evaporation, sputtering, molecular beam epitaxy (MBE), laser ablation, and chemical vapor deposition Audience: Undergraduate 3. Explain the concept of epitaxy in thin films Audience: Undergraduate 4. Explain the principles of various thin film characterization techniques Audience: Undergraduate 5. Design thin film deposition systems Audience: Undergraduate Learning Outcomes: 1. Apply concepts of the kinetic theory of gases to vacuum science and technology Audience: Undergraduate 2. Explain the principles of evaporation, sputtering, molecular beam epitaxy (MBE), laser ablation, and chemical vapor deposition Audience: Undergraduate 3. Explain the concept of epitaxy in thin films Audience: Undergraduate 4. Explain the principles of various thin film characterization techniques Audience: Undergraduate 5. Design thin film deposition systems Audience: Undergraduate
Sources
- Course catalogue ↗2026-2027