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N E 528

PLASMA PROCESSING AND TECHNOLOGY

3 credits.

Introduction to basic understanding and techniques. Plasma processing of materials for semiconductors, polymers, plasma spray coatings, ion implantation, etching, arcs, extractive metallurgy and welding. Plasma and materials diagnostics.

Prerequisites & course information

Requisites: PHYSICS 322 or E C E 320 , graduate/professional standing, or member of Engineering Guest Students Course Designation: Grad 50% - Counts toward 50% graduate coursework requirement Repeatable for Credit: No Last Taught: Fall 2021

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