SC/PHYS 3320
Microsystem Technology
2026–27 handbook
Topics
- Microsensors and actuators
- CMOS and micromachining
- mechanical transducers
- optical, thermal and magnetic microsystems
Readings
- Handbook reference(s): No required text. G. Kovacs, Micromachined Transducers Handbook. McGraw-Hill Publications; 1998.
Sources
- Course catalogue ↗2026–2027
- Reference books in a department handbook; not a confirmed required-book list for a particular 2026–27 section.